KAISER, Bert; LANGA, Sergiu; EHRIG, Lutz; STOLZ, Michael; SCHENK, Hermann; CONRAD, Holger; SCHENK, Harald; SCHIMMANZ, Klaus; SCHUFFENHAUER, David
(Springer Nature Limited, 2019)
MEMS-based micro speakers are attractive candidates as sound transducers for smart devices, particularly wearables and hearables. For such devices, high sound pressure levels, low harmonic distortion and low power consumption ...