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Sensitivity Evaluation of the Nanostructure-Enhanced BAW Mass Sensor

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dc.contributor.author ZAZERIN, A.
dc.contributor.author ULIANOVA, V.
dc.contributor.author BOGDAN, O.
dc.contributor.author ORLOV, A.
dc.date.accessioned 2020-05-18T11:32:24Z
dc.date.available 2020-05-18T11:32:24Z
dc.date.issued 2015
dc.identifier.citation ZAZERIN, A., ULIANOVA, V., BOGDAN, O. et al. Sensitivity Evaluation of the Nanostructure-Enhanced BAW Mass Sensor. In: ICNMBE: International conference on Nanotechnologies and Biomedical Engineering: proc. of the 3rd intern. conf., Sept. 23-26 : Program & Abstract Book , 2015. Chişinău, 2015, p. 97. en_US
dc.identifier.uri https://doi.org/10.1007/978-981-287-736-9_83
dc.identifier.uri http://repository.utm.md/handle/5014/8246
dc.description Access full text - https://doi.org/10.1007/978-981-287-736-9_83 en_US
dc.description.abstract The general implementation concept of the mass sensor based on membrane bulk acoustic wave resonator with nanostructured sensing layer was presented. The 3- dimensional finite element model of the thin film bulk acoustic wave resonator was built to estimate its sensitivity. It was shown that application of the nanostructured ZnO with large effective surface area provided the 20 times sensitivity increase over the polycrystalline sensing layer. The performance characteristics of the proposed sensor at the appointed conditions were described in details. en_US
dc.language.iso en en_US
dc.publisher Tehnica UTM en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject resonators en_US
dc.subject nanostructures en_US
dc.subject mass sensors en_US
dc.subject sensing layers en_US
dc.subject layers en_US
dc.title Sensitivity Evaluation of the Nanostructure-Enhanced BAW Mass Sensor en_US
dc.type Article en_US


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