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Fabrication MEMS Platform for Sensors Applications by Laser Micro Engraving

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dc.contributor.author IVANOVA, A. V.
dc.contributor.author OBLOV, K. Y.
dc.contributor.author SOLOVIEV, S. A.
dc.contributor.author SAMOTAEV, N. N.
dc.contributor.author GURKOVSKIY, B. V.
dc.contributor.author MIRONOV, V. D.
dc.date.accessioned 2020-05-18T10:28:06Z
dc.date.available 2020-05-18T10:28:06Z
dc.date.issued 2015
dc.identifier.citation IVANOVA, A. V., OBLOV, K. Y., SOLOVIEV, S. A. et al. Fabrication MEMS Platform for Sensors Applications by Laser Micro Engraving. In: ICNMBE: International conference on Nanotechnologies and Biomedical Engineering: proc. of the 3rd intern. conf., Sept. 23-26 : Program & Abstract Book , 2015. Chişinău, 2015, p. 94. en_US
dc.identifier.uri https://doi.org/10.1007/978-981-287-736-9_69
dc.identifier.uri http://repository.utm.md/handle/5014/8241
dc.description Access full text - https://doi.org/10.1007/978-981-287-736-9_69 en_US
dc.description.abstract The target of this work is the demonstration of advanced novel approaches able to provide rapid prototyping by using laser technology ceramic MEMS platforms for chemical sensor operating under harsh environmental conditions and, on the other hand, to assure microhotplate stable at high temperature, which can be used for the deposition of high working temperature gas sensing materials, for example, oxides of tin, gallium, zirconium and hafnium. As substrate ceramic material in work using alumina oxide. en_US
dc.language.iso en en_US
dc.publisher Tehnica UTM en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject laser en_US
dc.subject microhotplate en_US
dc.subject gas sensors en_US
dc.subject sensors en_US
dc.title Fabrication MEMS Platform for Sensors Applications by Laser Micro Engraving en_US
dc.type Article en_US


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