DSpace Repository
Fundamental Issues in the Manufacturing of Nanoelectromechanical (NEMS) and Related Nanosystems
JavaScript is disabled for your browser. Some features of this site may not work without it.
| dc.contributor.author | SINGH, R. | |
| dc.contributor.author | ALAPATT, G. F. | |
| dc.contributor.author | GUPTA, N. | |
| dc.contributor.author | POOLE, K. F. | |
| dc.date.accessioned | 2019-10-24T10:24:44Z | |
| dc.date.available | 2019-10-24T10:24:44Z | |
| dc.date.issued | 2011 | |
| dc.identifier.citation | SINGH, R., ALAPATT, G. F., GUPTA, N. et al. Fundamental Issues in the Manufacturing of Nanoelectromechanical (NEMS) and Related Nanosystems. In: ICNBME-2011. International conference on Nanotechnologies and Biomedical Engineering. German-moldovan workshop on Novel Nanomaterials for Electronic, Photonic and Biomedical Applications: proc. of the intern. conf., July 7-8, 2011. Chişinău, 2011, pp. 154-156. ISBN 978-9975-66-239-0. | en_US |
| dc.identifier.isbn | 978-9975-66-239-0 | |
| dc.identifier.uri | http://repository.utm.md/handle/5014/5191 | |
| dc.description.abstract | Nanostructures in dimension below about 10 nm show interesting properties because of the effect of low-dimension physics. However, to utilize these properties in practice to commercialize NEMS and related nano-systems require an extremely precise manufacturing process. This paper briefly evaluates the fundamental issues involved in manufacturing the nano-scale systems. | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Technical University of Moldova | en_US |
| dc.rights | Attribution-NonCommercial-NoDerivs 3.0 United States | * |
| dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/3.0/us/ | * |
| dc.subject | NEMS | en_US |
| dc.subject | manufacturing nanoelectronics | en_US |
| dc.subject | nanoelectronics | en_US |
| dc.subject | nanosystems | en_US |
| dc.subject | nanostructures | en_US |
| dc.title | Fundamental Issues in the Manufacturing of Nanoelectromechanical (NEMS) and Related Nanosystems | en_US |
| dc.type | Article | en_US |
Files in this item
The following license files are associated with this item:
This item appears in the following Collection(s)
Except where otherwise noted, this item's license is described as Attribution-NonCommercial-NoDerivs 3.0 United States