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Epitaxial In2O3 layers for chemical sensors: structural and surface characterization

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dc.contributor.author BRINZARI, V.
dc.contributor.author KOROTCENKOV, G.
dc.contributor.author MASEK, K.
dc.contributor.author MATOLIN, V.
dc.contributor.author LIBRA, J.
dc.contributor.author KAMEI, M.
dc.date.accessioned 2019-10-16T10:17:03Z
dc.date.available 2019-10-16T10:17:03Z
dc.date.issued 2005
dc.identifier.citation BRINZARI, V., KOROTCENKOV, G., MASEK, K. et al. Epitaxial In2O3 layers for chemical sensors: structural and surface characterization. In: Microelectronics and Computer Science: proc. of the 4th intern. conf., September 15-17, 2005. Chişinău, 2005, vol. 1, pp. 48-51. ISBN 9975-66-038-X. en_US
dc.identifier.isbn 9975-66-038-X
dc.identifier.uri http://repository.utm.md/handle/5014/4721
dc.description.abstract Indium oxide is one of the basic oxides, which have been extensively studied [1-3] due to its prominent applications for gas sensor design, and as modeling material, possessed of some interesting chemical and structural peculiarities such as polar surfaces and systematic anion vacancies. Like conductometric gas sensor material it demonstrates enhanced sensitivity to oxidizing gases (O3, NO, etc.). During our own experiments the interesting and unusual effects concerned with surface and gas sensing properties of undoped In2O3 thin films were revealed [4-6]. Nevertheless of rather great efforts in the direction of basic understanding it can be stated the lack of generalized pattern in description of sensitivity mechanism on that oxide. Thorough study of fundamental sensing properties needs well-characterized surfaces like in single crystals or epitaxial layers. Thus we make an attempt to prepare and characterize epitaxial layers of In2O3 with (100) orientation. As it is known (100) plane is the most stable in the In2O3 crystal. en_US
dc.language.iso en en_US
dc.publisher Technical University of Moldova en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject chemical sensors en_US
dc.subject gas sensors en_US
dc.subject sensors en_US
dc.subject indium oxide en_US
dc.subject crystals en_US
dc.title Epitaxial In2O3 layers for chemical sensors: structural and surface characterization en_US
dc.type Article en_US


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