DSpace Repository

Modern and low-cost technology with rapid photothermal processing for silicon solar cells fabrication

Show simple item record

dc.contributor.author SHISHIYANU, Sergiu
dc.contributor.author SINGH, Rajendra
dc.contributor.author SHISHIYANU, Teodor
dc.contributor.author POOLE, Kelvin
dc.date.accessioned 2019-10-16T08:48:39Z
dc.date.available 2019-10-16T08:48:39Z
dc.date.issued 2005
dc.identifier.citation SHISHIYANU, Sergiu, SINGH, Rajendra, SHISHIYANU, Teodor et al. Modern and low-cost technology with rapid photothermal processing for silicon solar cells fabrication. In: Microelectronics and Computer Science: proc. of the 4th intern. conf., September 15-17, 2005. Chişinău, 2005, vol. 1, pp. 20-24. ISBN 9975-66-038-X. en_US
dc.identifier.isbn 9975-66-038-X
dc.identifier.uri http://repository.utm.md/handle/5014/4709
dc.description.abstract The modern and inexpensive Nonconventional Technology with Rapid Photothermal Processing (RPP) and Rapid Thermal Processing (RTP) presents an important direction in the advanced technologies for micro-nano-electronics and solar cells fabrication. The priority of this technology compared to that conventional is in rapidity of the technological processes (diffusion, implantation and oxidation), energy budget, materials and gases reduction etc. RPP provide materials with homogenous microstructures, higher performance, higher reliability and yields of semiconductor devices. This report concern the investigations of most important steps of RPP solar cells fabrication: enhanced diffusion of P and B in silicon, Zn in GaAs and physic-mathematic model, shallow and ultra-shallow n+- p and n+- p – p+ junctions in Si, GaAs, and ohmic contacts. en_US
dc.language.iso en en_US
dc.publisher Technical University of Moldova en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject photothermal processing en_US
dc.subject solar cells fabrication en_US
dc.subject enhanced diffusion en_US
dc.title Modern and low-cost technology with rapid photothermal processing for silicon solar cells fabrication en_US
dc.type Article en_US


Files in this item

The following license files are associated with this item:

This item appears in the following Collection(s)

Show simple item record

Attribution-NonCommercial-NoDerivs 3.0 United States Except where otherwise noted, this item's license is described as Attribution-NonCommercial-NoDerivs 3.0 United States

Search DSpace


Advanced Search

Browse

My Account