The plasticity index of Cu films with different thicknesses on hard substrate

Abstract

In this paper the Cu/MgO and Cu/Si CSs were selected for the investigation of the plasticity index behavior. The nano-microhardness of the MgO and Si single crystals using as a substrate is 10-12 times higher in comparison with the polycrystalline Cu, so the CSs obtained are of type "soft-to-hard". The Cu films with thickness t=85; 470 and 1000 nm were deposited on the MgO and Si substrates by the magnetron sputtering method. Hardness (H) and Young’ modulus (E) were studied by the dynamic indentation method using the Nanotester-PMT3-NI–02 device equipped with a Berkovich indenter in a load range of Pmax=(5÷900) mN.