Hardness of the Cu thin films grown on the MgO substrate

Abstract

In this paper we studied the mechanical propeties of Cu thin films grown on MgO ( 4) substrate. The Cu films were obtained by the method of magnetron sputtering (with Magnetron Sputtering RF) at room temperature with thickness t=85 (I), 470 (2), 1000 (3) nm. The roughness, Ra, of the surface of thin films was estimated using the atomic force microscope and optical microscopes.