Abstract:
Deformation regularities of crystals, films and coated systems assume ever greater importance in recent years. Particularly, it concerns the micro- and nanoindentation processes because of their large practical application. The microstructure of deformed zones under quasistatic nano-microindentation of some of coated systems (Cu/LiF, Cu/MgO, ITO/Si, SnO2/Si) was considered in the work to study the deformation specificity of coated systems as a whole, comparing their behaviour with this of the bulk crystals (LiF, MgO, Si) used as substrate. It was revealed plastic round pile-ups of material near indentations on both the bulk single crystals and coated systems.