Comb drive actuated chip with three dimensional movement

Abstract

The following work reflects the scientific results obtained during a staging process in Neuchâtel, Switzerland in the frame of an international project SCOPES IB no. 7420-1100981/1. In the work is presented the design of two concept models that are a modification of a chip based on comb actuation effect developed for the INTEL company. The models posses an additional Z axis movement for integrating a 3 plane movement of the lens platform for obtaining a better coupling efficiency of the laser beam in optic modules used in fibre optic communication systems.