UHLIG, Sebastian; GAUDET, Matthieu; LANGA, Sergiu; SCHIMMANZ, Klaus; CONRAD, Holger; KAISER, Bert; SCHENK, Harald
(MDPI (Basel, Switzerland), 2018)
In this paper, an in-plane reciprocating displacement micropump for liquids and gases which is actuated by a new class of electrostatic bending actuators is reported. The so-called “Nano Electrostatic Drive” is capable of ...